Laser microlithography equipment

The University of Salford is looking to procure laser microlithography equipment that satisfies the following technical requirements:

• Be able to use ultraviolet light to create bespoke patterns on the surface of a wafer or chip • Be able to handle small chips in addition to full sized wafers • Be able to write large blocks of areas in one exposure (for example using a MEMS micromirror array). This means that laser lithography systems that use a single focused laser beam to write patterns pixel by pixel are not acceptable for this purchase • Be able to align the chip/wafer using registration fiducial marks on the backside of the chip/wafer as well as on the front side. • Have a minimum feature resolution less than 0.5 um • Delivery deadline of November 2024

Please send any queries or quotations to o.h.ward@salford.ac.uk by 12 noon on Friday 13th September 2024.